PDMS Device Fabrication and Surface Modification

Surface Modification for Microreactor Fabrication

In this paper, methods of surface modification of different supports, i.e. glass and polymeric beads for enzyme immobilisation are described. The developed method of enzyme immobilisation is based on Schiff’s base formation between the amino groups on the enzyme surface and the aldehyde groups on the chemically modified surface of the supports. The surface of silicon modified by APTS and GOPS w...

Silicon Micro/Nanomechanical Device Fabrication Based on Focused Ion Beam Surface Modification and KOH Etching

Selective Ga + ion implantation and miring by focused ion beam exposure and subsequent wet chemical etching is used to fabricate micro/nanomechanical elements in Si. Freestanding elements with a ~ 30 nm membrane thickness are made by controlled selective underetching between unexposed and exposed areas. Ultrahigh-frequency cantilever beams have been made with resonances in the tens of MHz range...

Pdms Surface Modification for Application on Thermally Responsive Hydrogel Microvalves

Recent developments in (MEMS) fabrication techniques have exploited the properties of polymers. Traditional lithographic techniques have been used to create a template in a thick layer of photoresist that can be filled with a heat -0r-UV curable polymer and used to cast numerous replicas of Tesla channels in an elastomeric material-poly (dimethylsioloxane) (PDMS). The surface of this replica, a...

Silicon Nanoribbon FET Sensors: Fabrication, Surface Modification and Microfluidic Integration

Over the past decade, the field of medical diagnostics has seen an incredible amount of research towards the integration of one-dimensional nanostructures such as carbon nanotubes, metallic and semiconducting nanowires and nanoribbons for a variety of bio-applications. Among the mentioned one-dimensional structures, silicon nanoribbon (SiNR) field-effect transistors (FET) as electro-chemical na...

Fabrication of Nanochannels on PDMS Molds